Xtirm-FC-300 概覽

Xtirm-FC-300 Overview

技術實力雄厚，專業的營銷設計團隊

Strengthen service. sales & marketing, design expertise

質量認證

Manufacture cleaners under ISO 9001  quality control IS09001

操作簡便、維護成本低

Reduce overhead costs and more efficient operations

交貨周期短，技術支持迅捷

Provide shorter lead-time and improvedtechnical support

半導體行業客戶認可度高

Highly focused on repeat orders from existing semi customers

Xtrim-FC-300 介紹

Xtrim-FC-300 introduction

在清洗機行業超25年經驗

Over 25 years of experience in cleaning equipment business

在上海，蘇州有完善的服務和銷售團隊

Full sales and warranty support in Shanghai

自主研發設計，生產、服務，可用于片盒、FOUP、光罩盒清洗

Designed,manufactured and serviced box/-FOUP/FOSB/MASKPOD cleaners

產品特點

Features

3rd Generation process cleaner for 50mm - 300m wafer handing products

針對2-12寸晶圓的第三代清洗設備

High-purity materials, PP, PVDF 316 suS, etc

適用于各種材質盒子，包括PP、PVD......

Front load/unload, or optional front load & back unload ftor bulk mounting

前載/前卸、前載/后卸等多種設計模式

Standard heated blower drying usingfab air

標準廠務熱空氣干量

Optional heated CDAN2 drving

熱CDA、N2干燥可選

Standard ambient DIW cleaning

標準DIW清洗容器

Small footprint ideal for cleanroom

無塵室盡可能小的占地設計

Maximum throughput in the industry

產能盡可能大的設計

Outstanding local support and spare parts avalilbility

技術支持實力雄厚，備件齊全

Lowestmaintenance,high MTBF &uptime

維護成本低，故障率低

-Manually load shipping boxes, Mask Pod or other wafer handling products in the custom-designed racks in the machine

手動取放盒子，可根據客戶要求設計方案

-Washing, rinsing and drving are fuilly automated when the operator verifies that the parts are securely loaded on all four racks and the machine door closed properly, before pressing the GO button on thetouch screen

自動化洗烘，一鍵啟動

All spinning speeds and directions will be automatically controled through the HMI

人機界面控制參數